Tunable composite interposer

ABSTRACT

A composite interposer can include a substrate element and a support element. The substrate element can have first and second opposite surfaces defining a thickness of 200 microns or less, and can have a plurality of contacts exposed at the first surface and electrically conductive structure extending through the thickness. The support element can have a body of at least one of dielectric or semiconductor material exposed at a second surface of the support element, openings extending through a thickness of the body, conductive vias extending within at least some of the openings in a direction of the thickness of the body, and terminals exposed at a first surface of the support element. The second surface of the support element can be united with the second surface of the substrate element. The terminals can be electrically connected with the contacts through the conductive vias and the electrically conductive structure.

BACKGROUND OF THE INVENTION

The present invention relates to packaging of microelectronic devicesand interposer structures, especially conductive via structures andmethods of forming such via structures in semiconductor and interposerpackages.

Microelectronic elements generally comprise a thin slab of asemiconductor material, such as silicon or gallium arsenide, commonlycalled a die or a semiconductor chip. Semiconductor chips are commonlyprovided as individual, prepackaged units. In some unit designs, thesemiconductor chip is mounted to a substrate or chip carrier, which isin turn mounted on a circuit panel, such as a printed circuit board.

The active circuitry is fabricated in a first face of the semiconductorchip (e.g., a second surface). To facilitate electrical connection tothe active circuitry, the chip is provided with bond pads on the sameface. The bond pads are typically placed in a regular array eitheraround the edges of the die or, for many memory devices, in the diecenter. The bond pads are generally made of a conductive metal, such ascopper, or aluminum, around 0.5 μm thick. The bond pads could include asingle layer or multiple layers of metal. The size of the bond pads willvary with the device type but will typically measure tens to hundreds ofmicrons on a side.

Through-silicon vias (TSVs) are used to connect the bond pads with asecond face of the semiconductor chip opposite the first face (e.g., afirst surface). A conventional via includes a hole penetrating throughthe semiconductor chip and a conductive material extending through thehole from the first face to the second face. The bond pads may beelectrically connected to vias to allow communication between the bondpads and conductive elements on the second face of the semiconductorchip.

Conventional TSV holes may reduce the portion of the first face that canbe used to contain the active circuitry. Such a reduction in theavailable space on the first face that can be used for active circuitrymay increase the amount of silicon required to produce eachsemiconductor chip, thereby potentially increasing the cost of eachchip.

Conventional vias may have reliability challenges because of anon-optimal stress distribution radiating from the vias and a mismatchof the coefficient of thermal expansion (CTE) between a semiconductorchip, for example, and the structure to which the chip is bonded. Forexample, when conductive vias within a semiconductor chip are insulatedby a relatively thin and stiff dielectric material, significant stressesmay be present within the vias due to CTE mismatch between theconductive material of the via and the material of the substrate. Inaddition, when the semiconductor chip is bonded to conductive elementsof a polymeric substrate, the electrical connections between the chipand the higher CTE structure of the substrate will be under stress dueto CTE mismatch.

Size is a significant consideration in any physical arrangement ofchips. The demand for more compact physical arrangements of chips hasbecome even more intense with the rapid progress of portable electronicdevices. Merely by way of example, devices commonly referred to as“smart phones” integrate the functions of a cellular telephone withpowerful data processors, memory and ancillary devices such as globalpositioning system receivers, electronic cameras, and local area networkconnections along with high-resolution displays and associated imageprocessing chips. Such devices can provide capabilities such as fullinternet connectivity, entertainment including full-resolution video,navigation, electronic banking and more, all in a pocket-size device.Complex portable devices require packing numerous chips into a smallspace. Moreover, some of the chips have many input and outputconnections, commonly referred to as “I/Os.” These I/Os must beinterconnected with the I/Os of other chips. The interconnections shouldbe short and should have low impedance to minimize signal propagationdelays. The components which form the interconnections should notgreatly increase the size of the assembly. Similar needs arise in otherapplications as, for example, in data servers such as those used ininternet search engines. For example, structures which provide numerousshort, low-impedance interconnects between complex chips can increasethe bandwidth of the search engine and reduce its power consumption.

Despite the advances that have been made in semiconductor via andinterposer via formation and interconnection, there is still a need forimprovements in order to minimize the size of semiconductor chips andinterposer structures, while enhancing electrical interconnectionreliability. These attributes of the present invention may be achievedby the construction of the components and the methods of fabricatingcomponents as described hereinafter.

BRIEF SUMMARY OF THE INVENTION

In accordance with an aspect of the invention, a composite interposercan include a substrate element and a support element. The substrateelement can consist essentially of at least one of dielectric orsemiconductor material. The substrate element can have first and secondopposite surfaces defining a thickness of 200 microns or less, and canhave a plurality of contacts exposed at the first surface andelectrically conductive structure extending through the thickness. Thesupport element can have a body of at least one of dielectric orsemiconductor material exposed at a second surface of the supportelement. The second surface of the support element can be united withthe second surface of the substrate element. The body can have acoefficient of thermal expansion (“CTE”) of less than 12 parts permillion per degree Celsius (“ppm/° C.”).

The support element can also have openings extending through a thicknessof the body between the second surface of the support element and afirst surface opposite thereto. The support element can also have aplurality of electrically conductive vias extending within at least someof the openings in a direction of the thickness of the body. The supportelement can also have terminals exposed at the first surface of thesupport element that are configured to electrically connect theinterposer with a component external to the interposer. The terminalscan be electrically connected with the contacts through the conductivevias and the electrically conductive structure.

In a particular embodiment, the contacts can have a smaller minimumpitch than the terminals. In one example, the contacts can have aminimum pitch that is at least five times less than a minimum pitch ofthe terminals. In an exemplary embodiment, the electrically conductivestructure extending through the substrate element thickness can includea plurality of conductive vias. A minimum pitch between any two adjacentones of the conductive vias of the substrate element can be less than orequal to a minimum pitch between any two adjacent ones of the conductivevias extending through the openings of the support element. In aparticular example, the electrically conductive structure extendingthrough the substrate element thickness can include a plurality ofconductive vias. A minimum pitch between any two adjacent ones of theconductive vias of the substrate element can be greater than a minimumpitch between any two adjacent ones of the conductive vias extendingthrough the openings of the support element.

In one embodiment, the electrically conductive structure extendingthrough the substrate element thickness can include a plurality ofconductive vias. A quantity of the conductive vias of the substrateelement can be equal to or greater than a quantity of the conductivevias extending through the openings of the support element. In aparticular embodiment, the electrically conductive structure extendingthrough the substrate element thickness can include a plurality ofconductive vias. A quantity of the conductive vias of the substrateelement can be less than a quantity of the conductive vias extendingthrough the openings of the support element. In one example, thethickness of the substrate element can be less than the thickness of thesupport element. In an exemplary embodiment, the thickness of thesubstrate element can be less than one-fifth the thickness of thesupport element.

In a particular example, the thickness of the support element can be atleast 1.5 times the thickness of the substrate element. The Young'smodulus of the support element can be greater than 60 GPa. In oneembodiment, the thickness of the support element can be at least 1.5times the thickness of the substrate element. The Young's modulus of thesupport element can be at least 1.3 times the Young's modulus of thesubstrate. In a particular embodiment, the body of the support elementcan consist essentially of dielectric material. In one example, thesubstrate element can consist essentially of a semiconductor material.In an exemplary embodiment, the body of the support element can consistessentially of glass, ceramic, or a low-k material. In a particularexample, the body of the support element can have a CTE that is within30% of the CTE of the substrate element.

In one embodiment, the body of the support element can consistessentially of a mesophase material or a liquid crystal material. In aparticular embodiment, the composite interposer can also include acompliant dielectric layer extending along the first surface of thesupport element. At least some of the terminals can at least partiallyoverlie the compliant dielectric layer. In one example, ends of theconductive vias adjacent the terminals can be movable in a firstdirection of the at least one lateral direction relative to thesubstrate element. In an exemplary embodiment, the conductive vias canbe configured to reduce stresses applied to the composite interposerfrom differential thermal expansion relative to a component attachedthereto adjacent the conductive vias.

In a particular example, an outer surface of each conductive via may notconform to a contour of an inner surface of the corresponding one of theopenings. In one embodiment, each conductive via can substantiallyentirely fill the corresponding one of the openings. In a particularembodiment, each conductive via can have a first width at the firstsurface of the support element and a second width at the second surfaceof the support element, the second width being different than the firstwidth. In one example, at least some of the conductive vias can includevoids dispersed within a conductive material therein. In an exemplaryembodiment, at least some of the conductive vias can be wire bonds. In aparticular example, each of at least some of the conductive vias can beseparated by a compliant dielectric material from an inner surface ofthe opening in which it extends.

In one embodiment, the compliant dielectric material can consistessentially of polyimide or silicone. The compliant dielectric materialcan have a modulus of elasticity less than 3 GPa. In a particularembodiment, the compliant dielectric material can consist essentially ofat least one of a foam material or a low-k material. In one example, atleast some of the openings can be substantially entirely filled with thecompliant dielectric material. In an exemplary embodiment, at least someof the openings can each define a rounded corner between the innersurface of the opening and the first surface of the support element. Ina particular example, each of at least some of the conductive vias canbe separated from an inner surface of the opening in which it extends bya void extending therebetween. In one embodiment, at least some of theterminals may not overlie the first surface of the support element. Inone example, at least some of the terminals may not overlie an openingof the support element.

In a particular embodiment, one or more of the openings can each have aplurality of the conductive vias extending therein. In one example, atleast one of the openings that has a plurality of the conductive viasextending therein can have a length extending in a first direction ofthe at least one lateral direction, and a width extending in a seconddirection of the at least one lateral direction that is transverse tothe first direction, the length being at least two times the width. Inan exemplary embodiment, two or more of the openings can have separateportions extending from the second surface of the support elementtowards the first surface thereof, and a single joined portion extendingfrom the separate portions to the first surface of the support element.

In a particular example, one or more of the openings can each beentirely filled with a dielectric material. In one embodiment, at leastone of the one or more of the openings can have a length extending in afirst direction of the at least one lateral direction, and a widthextending in a second direction of the at least one lateral directionthat is transverse to the first direction, the length being at least twotimes the width. In a particular embodiment, the composite interposercan also include a conductor layer extending along at least one of thesecond surfaces of the substrate element or the support element. Theconductor layer can provide direct electrical connection between theconductive vias and the electrically conductive structure.

In accordance with another aspect of the invention, a compositeinterposer can include a substrate element and a support element. Thesubstrate element can consist essentially of at least one of dielectricor semiconductor material. The substrate element can have first andsecond opposite surfaces defining a thickness of 200 microns or less,and can have a plurality of contacts exposed at the first surface andelectrically conductive structure extending through the thickness. Thesupport element can have a body of at least one of dielectric orsemiconductor material exposed at a second surface of the supportelement. The second surface of the support element can face the secondsurface of the substrate element. The body can have a CTE of less than12 ppm/° C.

The support element can also have openings extending through a thicknessof the body between the second surface of the support element and afirst surface opposite thereto. The support element can also have aplurality of electrically conductive vias extending within at least someof the openings in a direction of the thickness of the body. The supportelement can also have terminals exposed at the first surface of thesupport element that are configured to electrically connect theinterposer with a component external to the interposer. The terminalscan be electrically connected with the contacts through the conductivevias and the electrically conductive structure. The support element canbe joined with the substrate element by a plurality of conductivejoining units electrically connecting the conductive vias and theelectrically conductive structure.

In accordance with yet another aspect of the invention, amicroelectronic assembly can include a microelectronic element having asurface bearing element contacts thereon and a composite interposer. Thecomposite interposer can include a substrate element having first andsecond opposite surfaces and a support element assembled with thesubstrate element. The substrate element can also have a plurality ofcontacts exposed at the first surface and electrically conductivestructure extending through a thickness of the substrate element. Themicroelectronic element can be assembled with the substrate element suchthat at least some of the contacts are electrically connected with atleast some of the element contacts.

The support element can have a body of at least one of dielectric orsemiconductor material exposed at a second surface of the supportelement. The second surface of the support element can face the secondsurface of the substrate element. The support element can have openingsextending through a thickness of the body between the second surface ofthe support element and a first surface opposite thereto. The supportelement can have a plurality of electrically conductive vias extendingwithin at least some of the openings in a direction of the thickness ofthe body. The support element can have terminals exposed at the firstsurface of the support element that are configured to electricallyconnect the interposer with a component external to the microelectronicassembly. The terminals can be electrically connected with the contactsthrough the conductive vias and the electrically conductive structure.

In one example, the microelectronic element and the substrate elementcan consist essentially of silicon. In an exemplary embodiment, thesubstrate element can define a thickness of 200 microns or less betweenthe first and second surfaces thereof. In a particular example, the bodyof the support element can have a CTE of less than 12 ppm/° C. In oneembodiment, the at least some of the element contacts can face and canbe joined to the at least some of the contacts of the substrate element.In a particular embodiment, a rear surface of the microelectronicelement can face the first surface of the substrate element. The atleast some of the element contacts can be electrically connected to theat least some of the contacts of the substrate element throughconductive leads. At least some of the conductive leads can include wirebonds.

In one example, the microelectronic element can embody a greater numberof active devices to provide memory storage array function than anyother function. In an exemplary embodiment, the microelectronic assemblycan also include an additional microelectronic element having a surfacebearing element contacts thereon and including a semiconductor chipconfigured predominantly to perform a logic function. At least some ofthe contacts of the substrate element can be electrically connected withat least some of the element contacts of the additional microelectronicelement. In a particular example, the additional microelectronic elementcan include a buffer chip configured to regenerate signals received andto output the regenerated signals to the microelectronic element. In oneembodiment, the microelectronic assembly can also include an encapsulantextending between the microelectronic element and the additionalmicroelectronic element in a horizontal direction parallel to the firstsurface of the substrate element.

In a particular embodiment, the encapsulant can be a topographicalovermold having a first surface portion that can be parallel to a rearsurface of the microelectronic element and a second surface portion thatcan be parallel to a rear surface of the additional microelectronicelement. The first surface portion can extend in a different plane thanthe second surface portion. In one example, the microelectronic assemblycan also include an additional microelectronic element having a surfacebearing element contacts thereon. At least some of the contacts of thesubstrate element can be electrically connected with at least some ofthe element contacts of the additional microelectronic element. Theelement contacts of the microelectronic element can be directlyelectrically connected to the element contacts of the additionalmicroelectronic element through the electrically conductive structure ofthe substrate element for transfer of signals between themicroelectronic elements. The signals can represent at least one of dataor instructions. The microelectronic elements can be adapted tosimultaneously execute a set of instructions of a given thread of aprocess.

In an exemplary embodiment, the microelectronic element and theadditional microelectronic element can have substantially identicalstructure. In a particular example, the microelectronic element caninclude a plurality of stacked electrically interconnected semiconductorchips. In one embodiment, each of the chips can embody a greater numberof active devices to provide memory storage array function than anyother function. In a particular embodiment, the plurality of stackedsemiconductor chips can include a first semiconductor chip having theelement contacts thereon joined to the contacts of the substrateelement, and at least one second semiconductor chip overlying a rearsurface of the first semiconductor chip remote from the first surface ofthe substrate element and electrically interconnected with the firstsemiconductor chip. The at least one second semiconductor chip canembody a greater number of active devices to provide memory storagearray function than any other function.

In one example, the microelectronic assembly can also include a heatspreader in thermal communication with the microelectronic element. Inan exemplary embodiment, the microelectronic assembly can also include aconductor layer extending along at least one of the second surfaces ofthe substrate element or the support element. The conductor layer canprovide direct electrical connection between the conductive vias and theelectrically conductive structure. In a particular example, the supportelement can be joined with the substrate element by a plurality ofconductive joining units electrically connecting the conductive vias andthe electrically conductive structure.

In one embodiment, a system can include a microelectronic assembly asdescribed above mounted to a circuit panel. At least some of theterminals of the microelectronic assembly can be joined to andelectrically connected with panel contacts exposed at a surface of thecircuit panel. In a particular embodiment, the terminals can beelectrically connected to the panel contacts by conductive leads that atleast partially include wire bonds. In one example, the terminals can beelectrically connected to the panel contacts by conductive leads that atleast partially include conductive pillars. In an exemplary embodiment,the terminals can be electrically connected to the panel contacts byconductive leads that at least partially include a conductive joiningmaterial.

In a particular example, the support element can be joined with thesubstrate element by a first plurality of conductive joining unitselectrically connecting the conductive vias and the electricallyconductive structure. The support element can be joined with the circuitpanel by a second plurality of joining units electrically connecting theconductive vias and the panel contacts. In one embodiment, the firstplurality of joining units can contain an equal or greater number ofjoining units than the second plurality of joining units. In aparticular embodiment, the first plurality of joining units can containa fewer number of joining units than the second plurality of joiningunits.

Further aspects of the invention provide systems that incorporatestructures according to the foregoing aspects of the invention inconjunction with other electronic devices. In one example, a system caninclude a microelectronic assembly as described above and one or moreother electronic components electrically connected to themicroelectronic assembly. In an exemplary embodiment, the system canalso include a housing, the microelectronic assembly and the one or moreother electronic components being assembled with the housing. In aparticular example, the microelectronic assembly can be a firstmicroelectronic assembly, the system also including a secondmicroelectronic assembly as described above. In one embodiment, a modulecan include a plurality of microelectronic assemblies as describedabove, each microelectronic assembly mounted to, and electricallyconnected with a second circuit panel for transport of signals to andfrom each microelectronic assembly.

In accordance with still another aspect of the invention, a method offabricating a microelectronic assembly can include uniting exposedsurfaces of at least one of dielectric or semiconductor material of asubstrate element and a support element with one another. The substrateelement can have first and second opposite surfaces defining a thicknessof 200 microns or less. The substrate element can have a plurality ofcontacts exposed at the first surface and electrically conductivestructure extending through the thickness. The exposed surface of the atleast one of dielectric or semiconductor material of the substrateelement can be the second surface thereof.

The support element can have a body having first and second oppositesurfaces and a CTE of less than 12 ppm/° C. The support element can haveopenings extending between the first and second surfaces of the supportelement through a thickness of the body. The exposed surface of the atleast one of dielectric or semiconductor material of the support elementcan be the second surface thereof. The method can also include formingelectrically conductive vias extending within the openings and terminalsexposed at the first surface of the support element. The terminals canbe electrically connected with the contacts through the conductive viasand the electrically conductive structure.

In a particular embodiment, the step of forming the conductive vias andthe terminals can form at least some of the terminals integrally withthe conductive vias as ends of the conductive vias. In one example, theconductive vias can be formed as wire bonds. In an exemplary embodiment,the conductive vias can be formed by depositing a metal onto innersurfaces of the openings. In a particular example, the method can alsoinclude forming a compliant dielectric material extending within theopenings. The conductive vias can be formed extending within an apertureextending through the compliant dielectric material. In one embodiment,the method can also include forming a compliant dielectric materialextending within at least some of the openings overlying outer surfacesof the conductive vias, such that at least a portion of the compliantdielectric material is separated from an inner surface of the opening inwhich it extends by a void extending therebetween.

In a particular embodiment, the method can also include forming acompliant dielectric layer extending along the first surface of thesupport element. In one example, the method can also include forming aconductor layer extending along at least one of the second surfaces ofthe substrate element or the support element. The conductor layer canprovide direct electrical connection between the conductive vias and theelectrically conductive structure. In an exemplary embodiment, themethod can also include assembling a microelectronic element with thesubstrate element. The microelectronic element can have a surfacebearing element contacts thereon. At least some of the contacts of thesubstrate element can be electrically connected with at least some ofthe element contacts. In a particular example, the surface of themicroelectronic element can face the first surface of the substrate. Theassembling step can include joining at least some of the elementcontacts to at least some of the contacts of the substrate element.

In one embodiment, the assembling step can include electricallyconnecting the at least some of the contacts of the substrate with theat least some of the element contacts through conductive leads. At leastsome of the conductive leads can include wire bonds. In a particularembodiment, the method can also include assembling an additionalmicroelectronic element with the substrate element. The additionalmicroelectronic element can have a surface bearing element contactsthereon. At least some of the contacts of the substrate element can beelectrically connected with at least some of the element contacts of theadditional microelectronic element. In one example, the microelectronicelement can embody a greater number of active devices to provide memorystorage array function than any other function. The additionalmicroelectronic element can include a semiconductor chip configuredpredominantly to perform a logic function.

In an exemplary embodiment, the method can also include assembling acircuit panel with the support element. At least some of the terminalsof the microelectronic assembly can be joined to and electricallyconnected with panel contacts exposed at a surface of the circuit panel.In a particular example, the terminals can be electrically connected tothe panel contacts by conductive leads that at least partially includewire bonds. In one embodiment, the terminals can be electricallyconnected to the panel contacts by conductive leads that at leastpartially include conductive pillars. In a particular embodiment, theterminals can be electrically connected to the panel contacts byconductive leads that at least partially include a conductive joiningmaterial.

In accordance with another aspect of the invention, a method offabricating a microelectronic assembly can include assembling amicroelectronic element with a composite interposer. The microelectronicelement can have a surface bearing element contacts thereon. Thecomposite interposer can include a substrate element consistingessentially of at least one of dielectric or semiconductor material anda support element. The substrate element can have first and secondopposite surfaces defining a thickness of 200 microns or less. Thesubstrate element can have a plurality of contacts exposed at the firstsurface thereof and electrically conductive structure extending throughthe thickness. The support element can have a body of at least one ofdielectric or semiconductor material exposed at a second surface of thesupport element. The second surface of the support element can be unitedwith the second surface of the substrate element. The body can have aCTE of less than 12 ppm/° C.

The support element can have openings extending through a thickness ofthe body between the second surface of the support element and a firstsurface opposite thereto. The support element can have a plurality ofelectrically conductive vias extending within at least some of theopenings in a direction of the thickness of the body. The supportelement can have terminals exposed at the first surface of the supportelement that are configured to electrically connect the interposer witha component external to the interposer. The terminals can beelectrically connected with the contacts through the conductive vias andthe electrically conductive structure. The assembling step can includeelectrically connecting at least some of the contacts of the substrateelement with at least some of the element contacts. In one example, themethod can also include assembling a circuit panel with the supportelement. At least some of the terminals of the microelectronic assemblycan be joined to and electrically connected with panel contacts exposedat a surface of the circuit panel.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a side sectional view illustrating a microelectronic assemblyin accordance with an embodiment of the invention.

FIG. 1B is an enlarged side sectional view of a portion of FIG. 1A.

FIG. 1C is an enlarged side sectional view of a portion of FIG. 1Aexperiencing movement due to differential thermal expansion.

FIGS. 2A-2I are side sectional views illustrating stages of fabricationin accordance with the embodiment depicted in FIGS. 1A and 1B.

FIGS. 3A-3I are enlarged side sectional views illustrating alternativeembodiments of the second conductive vias shown in FIGS. 1A and 1B.

FIG. 4 is a side sectional view illustrating a microelectronic assemblyin accordance with another embodiment of the invention.

FIG. 5 is a side sectional view illustrating a microelectronic assemblyin accordance with yet another embodiment of the invention.

FIG. 6 is a side sectional view illustrating a microelectronic assemblyin accordance with still another embodiment of the invention.

FIG. 7 is a schematic depiction of a system according to one embodimentof the invention.

DETAILED DESCRIPTION

As illustrated in FIG. 1A, a microelectronic assembly 10 can include aninterconnection element 20 having a first surface 21 and a secondsurface 22 opposite therefrom, one or more microelectronic elements 30assembled with the interconnection element, an encapsulant 90 at leastpartially covering the microelectronic elements 30, and a circuit panel12 assembled with the interconnection element.

In FIG. 1A, the directions parallel to the first surface 21 are referredto herein as “horizontal” or “lateral” directions, whereas thedirections perpendicular to the first surface are referred to herein asupward or downward directions and are also referred to herein as the“vertical” directions. The directions referred to herein are in theframe of reference of the structures referred to. Thus, these directionsmay lie at any orientation to the normal or gravitational frame ofreference. A statement that one feature is disposed at a greater height“above a surface” than another feature means that the one feature is ata greater distance in the same orthogonal direction away from thesurface than the other feature. Conversely, a statement that one featureis disposed at a lesser height “above a surface” than another featuremeans that the one feature is at a smaller distance in the sameorthogonal direction away from the surface than the other feature.

As used in this disclosure, a statement that an electrically conductiveelement is “exposed at” a surface of a structure indicates that theelectrically conductive element is available for contact with atheoretical point moving in a direction perpendicular to the surfacetoward the surface from outside the structure. Thus, a terminal or otherconductive element which is exposed at a surface of a structure canproject from such surface; can be flush with such surface; or can berecessed relative to such surface and exposed through a hole ordepression in the structure.

The interconnection element 20 can include a substrate element 40, asupport element 50 united with the substrate element, conductor layers60, contacts 70 exposed at the first surface 21 of the interconnectionelement, and terminals 80 exposed at the second surface 22 of theinterconnection element.

As shown in FIG. 1A, the support element 40 can typically be laminatedwith the substrate element 50. For example, an adhesive layer can uniteconfronting surfaces of the support element 40 and the substrate element50. Such an adhesive layer can be a portion of the conductor layer 60 bdescribed below, or such an adhesive layer can be in addition to theconductor layer 60 b.

In one embodiment, or one or both of the substrate element 40 or thesupport element 50 can include a not-fully-cured material, e.g., a“B-stage material,” when confronting surfaces of the support element andthe substrate element are brought into contact with one another, andcuring of the B-stage material can take place thereafter, which in somecases may be assisted by application of heat, pressure, or both. Such aB-stage material layer can be a portion of the conductor layer 60 bdescribed below, or such a B-stage material layer can be in addition tothe conductor layer 60 b.

The interconnection element 20 can further include an insulatingdielectric layer 23 exposed at the second surface 22. Such a dielectriclayer can electrically insulate conductive elements from the substrateelement 40. This dielectric layer can be referred to as a “passivationlayer” of the substrate element 40. The dielectric layer 23 can includean inorganic or organic dielectric material or both. The dielectriclayer may include an electrodeposited conformal or non-conformal coatingor other dielectric material, for example, a photoimageable polymericmaterial, for example, a solder mask material.

In a particular example, the dielectric layer 23 can be compliant. Sucha compliant dielectric layer 23 can be formed from a material having arelatively low elastic modulus, for example, a Young's modulus of lessthan about 6 GPa. In a particular embodiment, the compliant dielectriclayer 23 can have elastic properties comparable to those of soft rubberabout 20 to 70 Shore A durometer hardness. For example, the compliantdielectric layer 23 can be a dielectric, and it can have a materialstructure formed from materials having a density or hardness of amaterial used as a filler in compositions such as flexibilized epoxy,silicone, a low modulus epoxy, a TEFLON based material, a foam typematerial, a liquid-crystal polymer, a thermoset polymer, afluoropolymer, a thermoplastic polymer, polyimide,polytetrafluoroethylene (PTFE), perfluoroalkoxy (PFA), fluorinatedethylene propylene (FEP), and polyfluoroethylene (PTFE) or likecompositions.

In some embodiments, for example, where the body 50 a of the supportelement 50 consists essentially of a dielectric material, or when it isdesired to ground one or more of the terminals 80 to the body of thesupport element, the dielectric layer 23 can be omitted, and theterminals can be formed in contact with the first surface 51 of thesupport element.

A microelectronic element 30, of which a plurality are shown in FIG. 1A,may in a particular example have a front surface 31 facing the firstsurface 21 of the interconnection element 20, as shown in FIG. 1A. Insome embodiments, a rear surface of one or more of the microelectronicelements 30 can face the first surface 21. In one example, at least oneof the microelectronic elements 30, for example, the microelectronicelement 30 a, can be flip-chip bonded to contacts 70 exposed at thefirst surface 21 of the interconnection element 20. Although themicroelectronic elements 30 are shown with the front surfaces 31 thereoffacing the first surface 21 of the interconnection element 20, in aparticular embodiment, the front surface 31 of one or more of themicroelectronic elements can face the second surface 22 of theinterconnection element.

In one example, one or more of the microelectronic elements 30 can bebare chips or microelectronic units each incorporating a memory storageelement such as a dynamic random access memory (“DRAM”) storage array orthat is configured to predominantly function as a DRAM storage array(e.g., a DRAM integrated circuit chip). As used herein, a “memorystorage element” refers to a multiplicity of memory cells arranged in anarray, together with circuitry usable to store and retrieve datatherefrom, such as for transport of the data over an electricalinterface.

In any of the embodiments described herein, one or more of themicroelectronic elements 30 can be implemented in one or more of thefollowing technologies: DRAM, NAND flash memory, RRAM (“resistive RAM”or “resistive random access memory”), phase-change memory (“PCM”),magnetoresistive random access memory, e.g. such as may embodimenttunnel junction devices, static random access memory (“SRAM”),spin-torque RAM, or content-addressable memory, among others.

In a particular example, a microelectronic element 30 that includes amemory storage element can have at least a memory storage arrayfunction, but the microelectronic element may not be a full-functionmemory chip. Such a microelectronic element may not have a bufferingfunction itself, but it may be electrically connected to othermicroelectronic elements in a stack of microelectronic elements, whereinat least one microelectronic element in the stack has a bufferingfunction (the buffering microelectronic element could be a buffer chip,a full-function memory chip, or a controller chip).

In other examples, one or more of the microelectronic elements in any ofthe packages described herein can be configured to predominantly providememory storage array function, such as the microelectronic element 30 ashown in FIG. 1A, in that one or more of the microelectronic elementscan have a greater number of active devices, e.g., transistors,configured to provide memory storage array function than any otherfunction, e.g., as flash memory, DRAM or other type of memory.

Such a microelectronic element that can be configured to predominantlyprovide memory storage array function can be arranged in a packagetogether with another microelectronic element or “logic chip” that isconfigured to predominantly provide logic function, such as themicroelectronic element 30 e shown in FIG. 1A. In a particularembodiment, the logic chip can be a programmable or processor elementsuch as a microprocessor or other general purpose computing element. Thelogic chip can be a microcontroller element, graphics processor,floating point processor, co-processor, digital signal processor, etc.In a particular embodiment, the logic chip can predominantly performhardware state machine functions, or otherwise be hard-coded to serve aparticular function or purpose. Alternatively, the logic chip can be anapplication specific integrated circuit (“ASIC”) or field programmablegate array (“FPGA”) chip. In such variation, the package then may be a“system in a package” (“SIP”).

In another variation, a microelectronic element in any of the packagesdescribed herein can have both logic and memory function embeddedtherein, such as a programmable processor having one or more associatedmemory storage arrays embedded therewith in the same microelectronicelement. Such microelectronic element is sometimes referred to as a“system-on-a-chip” (“SOC”), in that logic such as a processor isembedded together with other circuitry such as a memory storage array orcircuitry for performing some other function that may be a specializedfunction.

Each microelectronic element 30 can have a plurality of electricallyconductive element contacts 35 exposed at the front surface 31 thereof.The contacts 35 of each microelectronic element 30 can be arranged inone or more columns disposed in a central region of the front surface 31that occupies a central portion of an area of the front surface. Thecentral region, for example, may occupy an area of the front surface 31that includes a middle third of the shortest distance between opposedperipheral edges of the microelectronic element 30. In a particularexample, the contacts 35 can be arranged along an axis that bisects themicroelectronic element 30 or along an axis parallel to an axis thatbisects the microelectronic element. Such example may occur when thecontacts 35 are disposed in a central region of the front surface 31, orin other cases when contacts are not confined to a central region asdescribed.

In a particular example, each of the microelectronic elements 30 can befunctionally and mechanically equivalent to the other ones of themicroelectronic elements, such that each microelectronic element canhave the same pattern of electrically conductive contacts 35 at thefront surface 31 with the same function, although the particulardimensions of the length, width, and height of each microelectronicelement can be different than that of the other microelectronicelements.

The microelectronic assembly 10 can include two microelectronic elements30 including first and second microelectronic elements 30 a and 30 bthat are stacked relative to one another. In the embodiment shown inFIG. 1A, the front surface 31 of the first microelectronic element 30 acan confront the first surface 21 of the interconnection element 20, andthe front surface 31 of the second microelectronic element 30 b and therear surface 32 of the first microelectronic element 30 a can face oneanother. At least a portion of the front surface 31 of the secondmicroelectronic element 30 b can overlie at least a portion of the rearsurface of the first microelectronic element 30 a. Additionalmicroelectronic elements 30 c and 30 d can be stacked relative to themicroelectronic elements 30 a and 30 b, as shown in FIG. 1A. In aparticular example, all of the microelectronic elements 30 a, 30 b, 30c, and 30 d can be configured to predominantly provide memory storagearray function. In one example, one or more of the microelectronicelements 30 a, 30 b, 30 c, and 30 d can include a memory storage controldevice.

Although the microelectronic elements 30 are shown in FIG. 1A as beingarranged in a flip-chip bonded stack, with the front surfaces 31 thereoffacing the first surface 21 of the interconnection element 20, in otherembodiments, one or more of the microelectronic elements may be mountedand electrically connected to other microelectronic elements and/or theinterconnection element in other ways. For example, any of themicroelectronic elements 30 can be disposed with the rear surface 32thereof facing the first surface 21 of the interconnection element 20.In one example, the contacts 35 of such microelectronic elements 30 canbe connected to contacts 70 of the interconnection element 20 byconductive structure extending above the front surface 31 thereof, forexample, which may be or include wire bonds, among others.

As used herein, a “lead” is a portion of or the entire electricalconnection extending between two electrically conductive elements. Forexample, a lead may include wire bonds, joining units such as solderballs, conductive vias, and conductive traces extending between contactsof a first element such as the contacts 31 of the microelectronicelement 30 a and contacts of a second element such as the contacts 15 ofthe circuit panel 12.

In a particular example, instead of or in addition to the aforementionedmicroelectronic elements 30, one or more passive elements 30′, such as adecoupling capacitor, can be mounted to the first and/or second surfaces21, 22 of the interconnection element 20 and can be electricallyconnected with electrically conductive elements of the interconnectionelement. In a particular example, one or more of the passive elements30′ can be a control device or a timing element device. Such passiveelements 30′ can be electrically connected to internal power supplyand/or ground buses inside the microelectronic assembly 10.

The substrate element 40 can have first and second opposed surfaces 41and 42, and first conductive vias 44 extending in a direction of athickness of the substrate element between the first and secondsurfaces. The substrate element 40 can include a body 40 a of at leastone of dielectric or semiconductor material. In one embodiment, the body40 a can be made essentially of a semiconductor material such as siliconor gallium arsenide, for example. In one example, the body 40 a of thesubstrate element 40 can be made essentially of silicon carbide. Inparticular embodiments, a body 40 a of silicon carbide can be doped sothat active devices can be included therein. In an exemplary embodiment,the body 40 a of the substrate element 40 can consist essentially of lowthermal expansion glass (e.g., quartz). In one example, the substrateelement 40 can be a light emitting diode (“LED”).

In embodiments where the substrate element 40 includes a semiconductorbody 40 a, made for example from silicon, one or a plurality ofsemiconductor devices (e.g., transistors, diodes, etc.) can be disposedin one or more active device regions thereof located at and/or below thefirst surface 41 of the substrate element. In a particular example, suchactive device regions within the body 40 a of the substrate element 40can be located below a conductor layer 60 a as described below.

The support element 50 can include a body 50 a of at least one ofdielectric or semiconductor material, first and second opposed surfaces51 and 52, openings 53 extending through a thickness of the body betweenthe first and second surfaces, and second conductive vias 54 extendingwithin at least some of the openings. In one example, the secondconductive vias 54 can extend within at least some of the openings 53 ina direction of the thickness of the body 50 a. The second conductivevias 54 can be electrically connected with the at least some of thecontacts 70 through the first conductive vias 44.

In one embodiment, one or more of the openings 53 can each have aplurality of second conductive vias 54 extending therein. In aparticular embodiment, one or more of the openings 53 can each have asingle conductive via 54 extending therein. The openings 30 can bearranged in any top-view geometric configuration, including for example,an m×n array, each of m and n being greater than 1.

In one example, the thickness of the substrate element 40 between thefirst and second surfaces 41, 42 thereof can be less than the thicknessof the support element 50 between the first and second surfaces 51, 52thereof. In a particular embodiment, the thickness of the substrateelement 40 between the first and second surfaces 41, 42 thereof can beless than one-fifth the thickness of the support element 50 between thefirst and second surfaces 51, 52 thereof.

In one embodiment, the thickness of the support element 50 can be is atleast 1.5 times the thickness of the substrate element 40, and theYoung's modulus of the support element can be greater than 60 GPa. In aparticular example, the thickness of the support element 50 can be is atleast 1.5 times the thickness of the substrate element 40, and theYoung's modulus of the support element can be greater than 120 GPa. Inan exemplary embodiment, the thickness of the support element 50 can beat least 1.5 times the thickness of the substrate element 40, and theYoung's modulus of the support element can be equal to or greater thanthe Young's modulus of the substrate element. In one example, thethickness of the support element 50 can be at least 1.5 times thethickness of the substrate element 40, and the Young's modulus of thesupport element can be at least 1.3 times the Young's modulus of thesubstrate element.

In a particular example, the body 50 a of the support element 50 canconsist essentially of dielectric material, such as, for example, glass,ceramic, or liquid crystal. In one embodiment, the body 50 a of thesupport element 50 can have a CTE in a plane parallel to the firstsurface 21 of the interconnection element 20 of less than 12 ppm/° C. Inan exemplary embodiment, the body 50 a of the support element 50 canhave a CTE that is within 30% of a CTE of the substrate element 40. Inone example, when the substrate element 40 is made of silicon having aCTE of approximately 3 ppm/° C., the CTE of the support element 50 canbe approximately 3.5 ppm/° C.

In one example, the body 50 a of the support element 50 can consistessentially of a semiconductor material such as silicon. In a particularembodiment, the body 40 a of the substrate element 40 can consistessentially of silicon, and the body 50 a of the support element 50 canconsist essentially of silicon. In such an example, in some cases, thebody 50 a of the support element 50 can be manufactured according tomore relaxed tolerances than the body 40 a of the substrate element 40,and the body of the support element may in some cases consistessentially of polycrystalline semiconductor material.

In one example, the body 50 a of the support element 50 can consistsessentially of a mesophase material. Such a mesophase material can havea highly ordered structure, e.g., carbonaceous, alumina, titania,beryllium titanate, that can be tunable to a specific CTE by addingdisorder (e.g., impurities) locally. In one embodiment, the body 50 a ofthe support element 50 can consists essentially of carbon-based materialthat can be made from pitch (bitumen). In such an embodiment, theYoung's modulus of the body 50 a can be affected locally by orientationof the carbon-based material in a laminated structure or by chemicaltreatment.

In an exemplary embodiment, the CTE of the support element 50 can betuned to approximately match the CTE of the substrate element 40, sothat differential thermal expansion of the support element relative tothe substrate element can be minimized. In one example, the CTE of thesupport element 50 can be tuned by designing the structure of the body50 a of the support element to have a particular CTE, such as byintroducing impurities or voids into a mesophase material or byorienting the direction of material of the body of the support element.

In a particular example, the CTE of the support element 50 can be tunedby removing material from the body 50 a of the support element byforming openings 53 in a particular configuration to achieve a desiredCTE. For example, the CTE of a support element 50 having a body 50 a ofa particular CTE can be changed by adding openings 53 that do not havesecond conductive vias 54 extending therein.

The openings 53 can each include inner surfaces 55 that extend from thefirst surface 51 of the support element 50 therethrough at an anglebetween 0 and 90 degrees to the horizontal plane defined by the firstsurface. The inner surface 55 can have a constant slope or a varyingslope. For example, the angle or slope of the inner surface 55 relativeto the horizontal plane defined by the first surface 51 of the supportelement 50 can decrease in magnitude (i.e., become less positive or lessnegative) as the inner surface 55 penetrates further towards the secondsurface 52. For example, one or more of the opening 53 can have aconstant width, the openings can be tapered in a direction from thefirst surface 51 towards the second surface 52, or the openings can betapered in a direction from the second surface towards the firstsurface.

In some examples, each opening 53 can have any three-dimensional shape,including for example, a frusto-conical shape, a cylinder, a cube, aprism, an elliptic paraboloid, a hyperboloid, or a structure bounded bya curvilinear inner surface, among others. As used herein, when athree-dimensional structure is described as having or being bounded by acurvilinear surface, a cross-section of that surface in a plane that isgenerally perpendicular to the first and second surfaces of thesubstrate element is a curve having a varying slope (e.g., a secondorder polynomial).

The openings 53 can have any top-view shape. For example, the openingscan have a cylindrical top-view shape and a rectangular longitudinalcross-section, as shown in FIG. 1A. In one example, one or more of theopenings 53 can have a channel or trench shape. In a particularembodiment, such channel-shaped openings can have a length extending ina first direction of the at least one lateral direction, and a widthextending in a second direction of the at least one lateral directionthat is transverse to the first direction, the length being at least twotimes the width. In one example, two or more of the openings 53 can eachhave separate portions extending from the second surface 52 of thesupport element 50 towards the first surface 51 thereof, and a singlejoined portion extending from the separate portions to the first surfaceof the support element.

In an exemplary embodiment, a plurality of the second conductive vias 54can extend within a single one of the openings 53. In one example, aplurality of the second conductive vias 54 can extend within a singletrench-shaped opening 53, such trench-shaped opening having a lengthextending in a first direction of the at least one lateral direction,and a width extending in a second direction of the at least one lateraldirection that is transverse to the first direction, the length being atleast two times the width.

In particular embodiments, the opening 53 and any of the other openingsdescribed herein can have various shapes, as described for example inUnited States Patent Application Publication Nos. 2012/0018863 and2012/0018868, which are hereby incorporated by reference herein, andsuch openings can be formed using exemplary processes as described inthe aforementioned applications.

As shown in FIG. 1A, one or more of the openings 53 each can bepartially or entirely filled with a dielectric material 56. Such adielectric material 56 can electrically insulate the second conductivevias 54 from the body 50 a of the support element 50. In someembodiments, for example, where the body 50 a of the support element 50consists essentially of a dielectric material, or when it is desired toground one or more of the second conductive vias 54 to the body of thesupport element, the dielectric material 56 can be omitted, and thesecond conductive vias can be formed in contact with the inner surfaces55 of the corresponding openings 53.

The dielectric material 56 can include an inorganic or organicdielectric material or both. In a particular example, the dielectricmaterial 56 can be compliant. The dielectric material 56 can include anyof the materials described above with reference to the compliantdielectric layer 23. In a particular example, dielectric material 56 andthe insulating dielectric layer 23 can be formed together as a singleinsulating dielectric region, or they can be formed separately asindividual insulating dielectric regions.

In a particular example, ends 58 of the second conductive vias 54adjacent the terminals 80 can be movable in a first direction, forexample the direction L1, of the at least one lateral direction relativeto the body 50 a of the support element 50. Such movement canaccommodate external loads applied to the terminals 80, such as due tothermal expansion of the circuit panel 12 relative to theinterconnection element 20. An example of the movement of such movableterminals 80 is shown in FIG. 1C. As shown, a force F is applied to thejoining unit 11, for example, from differential thermal expansion of thecircuit panel 12 relative to the body 50 a of the support element 50.The force F acts to move the terminal 80, and the movement of theterminal creates a bending load on the conductive via 54, which bends ordeflects to a configuration 54′. The tip of the conductive via 54′ hasmoved a distance D from its initial unbent position. If the force F isdecreased or removed, for example, by a temperature change and decreaseof the differential thermal expansion of the circuit panel 12 relativeto the interconnection element 20, the conductive via 54′ can bend ordeflect back to its initial unbent position shown in FIG. 1B.

As used in the claims with respect to a conductive element joined to asubstrate or support element body, the term “movable” means that whenthe support element is exposed to external loads, such as may occur as aresult of thermal excursions during fabrication, testing or operation ofthe inventive assembly, at least a portion of the conductive element iscapable of being displaced relative to the support element by theexternal loads applied to the conductive element through the joints withthe contacts or terminals of an external element such as a circuitpanel, to the extent that the displacement appreciably relievesmechanical stresses, such as those caused by differential thermalexpansion which would be present in the electrical connections betweenthe support element and the circuit panel absent such displacement.

The conductor layer 60 can each extend in at least one lateraldirection, for example, the lateral direction L1, parallel to the firstsurface 41 of the substrate element 40. There can be one or moreconductor layers 60, such as the conductor layer 60 a adjacent the firstsurface 21 of the interconnection element 20 and the conductor layer 60b disposed between the second surface 42 of the substrate element 40 andthe second surface 52 of the support element 50.

In one example, the interconnection element 20 can include a singleconductor layer 60 a disposed adjacent the first surface 41 of thesubstrate element 40, wherein the contacts 70 are electrically connectedwith the first conductive vias 44 through the conductor layer 60 a. Inone embodiment, the interconnection element 20 can include a singleconductor layer 60 b disposed adjacent the second surface 42 of thesubstrate element 40, wherein the first conductive vias 44 areelectrically connected with the second conductive vias 54 through theconductor layer 60 b.

In a particular embodiment, the interconnection element 20 can includeboth the first conductor layer 60 a and the second conductor layer 60 b.The first conductor layer 60 a can be disposed adjacent the firstsurface 41 of the substrate element 40, and the contacts 70 can beelectrically connected with the first conductive vias 44 through thefirst conductor layer 60 a. The second conductor layer 60 b can bedisposed adjacent the second surface 42 of the substrate element 40, andthe first conductive vias 44 can be electrically connected with thesecond conductive vias 54 through the second conductor layer 60 b.

The terminals 80 can be exposed at the first surface 51 of the supportelement 50 for connection with a component external to theinterconnection element 20, the terminals being electrically connectedwith the second conductive vias 54.

The interconnection element 20 can include conductive joining units 11attached to the terminals 80 for connection with an external component.The joining units 11 can be, for example, masses of a bond metal such assolder, tin, indium, a eutectic composition or combination thereof, oranother joining material such as a conductive paste or a conductiveadhesive. In a particular embodiment, the joints between the terminals80 and contacts of an external component (e.g., the circuit panel 12shown in FIG. 1A) can include an electrically conductive matrix materialsuch as described in U.S. patent application Ser. Nos. 13/155,719 and13/158,797, the disclosures of which are hereby incorporated herein byreference. In a particular embodiment, the joints can have a similarstructure or be formed in a manner as described therein.

The contacts 70 can be exposed at the first surface of the substrateelement 40, the contacts being electrically connected with the firstconductive vias 44. The contacts 70 can be joined to element contacts 35of at least one of the microelectronic elements 30 by conductive joiningunits 71. The conductive joining units 71 can be similar in structureand function to the joining units 11 described above.

In a particular example, the contacts 70 can have a finer minimum pitchthan the terminals 80, i.e., the minimum distance D1 between centers ofadjacent ones of the contacts can be less than the minimum distance D2between centers of adjacent ones of the terminals. In one embodiment,the minimum pitch of the contacts 70 can be at least five times lessthan the minimum pitch of the terminals 80.

The microelectronic assembly 10 can also include an encapsulant 90 thatcan optionally cover, partially cover, or leave uncovered the rearsurfaces 32 of the microelectronic elements 30. For example, in themicroelectronic assembly 10 shown in FIG. 1A, an encapsulant can beflowed, stenciled, screened or dispensed onto the rear surfaces 32 ofthe microelectronic elements 30. In another example, the encapsulant 90can be a mold compound which is formed thereon by overmolding. In someembodiments, portions of the encapsulant 90 can be removed, such thatthe encapsulant does not have a planar exposed surface 91. In oneexample, the encapsulant 90 can have a greater thickness between somemicroelectronic elements 30 and the exposed surface 91 than betweenother microelectronic elements and the exposed surface.

The circuit panel 12 can have first and second opposing surfaces 13 and14 and pluralities of electrically conductive panel contacts 15 exposedat the first surface. The interconnection element 20 can be mounted tothe panel contacts 15, for example, by the joining units 11 that canextend between the terminals 80 and the panel contacts. As shown in FIG.1A, the second surface 22 of the interconnection element 20 can confrontthe first surface 13 of the circuit panel 12.

The circuit panel 12 can include a sheet-like substrate that can consistessentially of a polymeric material such as polyimide, epoxy,thermoplastic, thermoset plastic, or other suitable polymeric materialor that includes or consists essentially of compositepolymeric-inorganic material such as a glass reinforced structure of BTresin (bismaleimide triazine) or epoxy-glass, such as FR-4, amongothers. In one example, such a substrate of the circuit panel 12 canconsist essentially of a material having a CTE of less than 30 ppm/° C.in the plane of the substrate, i.e., in a direction along its surface.

A method of fabricating the microelectronic assembly (FIGS. 1A and 1B)will now be described, with reference to the FIGS. 2A through 2I. Asillustrated in FIG. 2A, the openings 43 can be formed extending throughthe thickness of the body 40 a of the substrate element 40 from thefirst surface 41 towards the second surface 42. The openings 43 can beformed for example, by selectively etching the substrate element 40,after forming a mask layer where it is desired to preserve remainingportions of the first surface 41. For example, a photoimageable layer,e.g., a photoresist layer, can be deposited and patterned to cover onlyportions of the first surface 41, after which a timed etch process canbe conducted to form the openings 43.

The inner surfaces 45 of the openings 43 may extend in a vertical orsubstantially vertical direction downwardly from the first surface 41towards the second surface 42 substantially at right angles to theexposed surface, as shown in FIG. 2A. Anisotropic etching processes,laser ablation, mechanical removal processes, e.g., milling, ultrasonicmachining, directing a jet of fine abrasive particles towards thesubstrate element 40, reactive ion etching, or plasma etching, orcombinations of multiple processes mentioned above, among others, can beused to form openings 43 having essentially vertical inner surfaces.

Alternatively, instead of being substantially at right angles to theexposed surface, the inner surfaces 45 of the openings 43 may be sloped,i.e., may extend at angles other a normal angle (right angle) to theexposed surface. Wet etching processes, e.g., isotropic etchingprocesses and sawing using a tapered blade, among others, can be used toform openings 43 having sloped inner surfaces 45. Laser ablation,mechanical milling, chemical etching, plasma etching, directing a jet offine abrasive particles towards the substrate element 40, among others,can also be used to form the openings 43 (or any other hole or openingdescribed herein) having sloped inner surfaces 45.

In some examples, at least a portion of the inner surfaces 45 of one ormore of the openings 43 can have a cross-sectional shape that is anelliptic paraboloid, a hyperboloid, or a curvilinear shape, amongothers. As used herein, when a surface is described as havingcurvilinear cross-sectional shape, a cross-section of that surface in aplane that is generally perpendicular to the first and second surfacesof the substrate element is a curve having a varying slope (e.g., asecond order polynomial).

Thereafter, an insulating dielectric layer (not visible in FIG. 2A) canbe formed on the inner surface 45 of each opening 43. Various methodscan be used to form such an insulating dielectric layer overlying theinner surfaces 45 of the openings 43, and such methods are describedbelow. In particular examples, chemical vapor deposition (CVD) or atomiclayer deposition (ALD) can be used to deposit a thin insulatingdielectric layer overlying the inner surfaces 45 of the openings 43. Inone example, tetraethylorthosilicate (TEOS) can be used during alow-temperature process for depositing such an insulating dielectriclayer. In exemplary embodiments, a layer of silicon dioxide,borophosphosilicate glass (BPSG), borosilicate glass (BSG), orphosphosilicate glass (PSG) can be deposited overlying the innersurfaces 45 of the openings 43, and such glass can be doped or undoped.

In one example, a flowable dielectric material can be applied to thefirst surface 41 of the substrate element 40, and the flowable materialcan then more evenly distributed across the exposed surface during a“spin-coating” operation, followed by a drying cycle which may includeheating. In another example, a thermoplastic film of dielectric materialcan be applied to the first surface 41 after which the assembly isheated, or is heated in a vacuum environment, i.e., placed in anenvironment under lower than ambient pressure. In another example, vapordeposition can be used to form the insulating dielectric layer.

In still another example, the assembly including the substrate element40 can be immersed in a dielectric deposition bath to form a conformaldielectric coating or insulating dielectric layer. As used herein, a“conformal coating” is a coating of a particular material that conformsto a contour of the surface being coated, such as when the insultingdielectric layer conforms to a contour of the inner surface 45 of theopenings 43. An electrochemical deposition method can be used to formthe conformal dielectric layer, including for example, electrophoreticdeposition or electrolytic deposition.

In one example, an electrophoretic deposition technique can be used toform the conformal dielectric coating, such that the conformaldielectric coating is only deposited onto exposed conductive andsemiconductive surfaces of the assembly. During deposition, thesemiconductor device wafer is held at a desired electric potential andan electrode is immersed into the bath to hold the bath at a differentdesired potential. The assembly is then held in the bath underappropriate conditions for a sufficient time to form an electrodepositedconformal dielectric layer on exposed surfaces of the substrate element40 that are conductive or semiconductive, including but not limited toalong the inner surface 45 of the openings 43. Electrophoreticdeposition occurs so long as a sufficiently strong electric field ismaintained between the surface to be coated thereby and the bath. As theelectrophoretically deposited coating is self-limiting in that after itreaches a certain thickness governed by parameters, e.g., voltage,concentration, etc. of its deposition, deposition stops.

Electrophoretic deposition forms a continuous and uniformly thickconformal coating on conductive and/or semiconductive exterior surfacesof the assembly. In addition, the electrophoretic coating can bedeposited so that it does not form on a remaining passivation layeroverlying the first surface 41 of the substrate element 40, due to itsdielectric (nonconductive) property. Stated another way, a property ofelectrophoretic deposition is that it does not normally form on a layerof dielectric material, and it does not form on a dielectric layeroverlying a conductor provided that the layer of dielectric material hassufficient thickness, given its dielectric properties. Typically,electrophoretic deposition will not occur on dielectric layers havingthicknesses greater than about 10 microns to a few tens of microns. Theconformal dielectric layer can be formed from a cathodic epoxydeposition precursor. Alternatively, a polyurethane or acrylicdeposition precursor could be used. A variety of electrophoretic coatingprecursor compositions and sources of supply are listed in Table 1below.

TABLE 1 ECOAT NAME POWERCRON 645 POWERCRON 648 CATHOGUARD 325MANUFACTURERS MFG PPG PPG BASF TYPE CATHODIC CATHODIC CATHODIC POLYMERBASE EPOXY EPOXY EPOXY LOCATION Pittsburgh, PA Pittsburgh, PASouthfield, MI APPLICATION DATA Pb/Pf-free Pb-free Pb or Pf-free Pb-freeHAPs, g/L 60-84 COMPLIANT VOC, g/L (MINUS WATER) 60-84 <95 CURE 20min/175 C 20 min/175 C FILM PROPERTIES COLOR Black Black BlackTHICKNESS, μm 10-35 10-38 13-36 PENCIL HARDNESS 2H+ 4H BATHCHARACTERISTICS SOLIDS, % wt. 20 (18-22) 20 (19-21) 17.0-21.0 pH (25 C.)5.9 (5.8-6.2) 5.8 (5.6-5.9) 5.4-6.0 CONDUCTIVITY (25 C.) μS 1000-15001200-1500 1000-1700 P/B RATIO 0.12-0.14 0.12-0.16 0.15-0.20 OPERATIONTEMP., C. 30-34 34 29-35 TIME, sec 120-180 60-180 120+ ANODE SS316 SS316SS316 VOLTS 200-400 >100 ECOAT NAME ELECTROLAC LECTRASEAL DV494LECTROBASE 101 MANUFACTURERS MFG MACDERMID LVH COATINGS LVH COATINGSTYPE CATHODIC ANODIC CATHODIC POLYMER BASE POLYURETHANE URETHANEURETHANE LOCATION Waterbury, CT Birmingham, UK Birmingham, UKAPPLICATION DATA Pb/Pf-free Pb-free Pb-free HAPs, g/L VOC, g/L (MINUSWATER) CURE 20 min/149 C. 20 min/175 C. 20 min/175 C. FILM PROPERTIESCOLOR Clear (+dyed) Black Black THICKNESS, μm 10-35 10-35 PENCILHARDNESS 4H BATH CHARACTERISTICS SOLIDS, % wt. 7.0 (6.5-8.0) 10-12 9-11pH (25 C.) 5.5-5.9 7-9 4.3 CONDUCTIVITY (25 C.) μS 450-600 500-800400-800 P/B RATIO OPERATION TEMP., C. 27-32 23-28 23-28 TIME, sec 60-120ANODE SS316 316SS 316SS VOLTS 40, max 50-150

In another example, the dielectric layer can be formed electrolytically.This process is similar to electrophoretic deposition, except that thethickness of the deposited layer is not limited by proximity to theconductive or semiconductive surface from which it is formed. In thisway, an electrolytically deposited dielectric layer can be formed to athickness that is selected based on requirements, and processing time isa factor in the thickness achieved.

Thereafter, as illustrated in FIG. 2B, the first conductive vias 44 canbe formed overlying the insulating dielectric layer, at least within theopenings 43, such that a contour of each first conductive via conformsto contours of the corresponding inner surfaces 45.

To form the first conductive vias 44 (and any of the other conductiveelements described herein), an exemplary method involves depositing ametal layer by one or more of sputtering a primary metal layer ontoexposed surfaces of the substrate element 40 and the openings 43,plating, or mechanical deposition. Mechanical deposition can involve thedirecting a stream of heated metal particles at high speed onto thesurface to be coated. This step can be performed by blanket depositiononto the first surface 41 and the inner surfaces 45, for example. Inother embodiments, sub-micron metal powder can be screened orselectively screened into the openings 43, for example, using a pulselaser, and the metal flow will fill the cavities. This step can beperformed by blanket deposition onto the dielectric layer within theopenings 43.

In one embodiment, the primary metal layer includes or consistsessentially of aluminum. In another particular embodiment, the primarymetal layer includes or consists essentially of copper. In yet anotherembodiment, the primary metal layer includes or consists essentially oftitanium. One or more other exemplary metals can be used in a process toform the first conductive vias 44 (and any of the other conductiveelements described herein). In particular examples, a stack including aplurality of metal layers can be formed on one or more of theafore-mentioned surfaces. For example, such stacked metal layers caninclude a layer of titanium followed by a layer of copper overlying thetitanium (Ti—Cu), a layer of nickel followed by a layer of copperoverlying the nickel layer (Ni—Cu), a stack of nickel-titanium-copper(Ni—Ti—Cu) provided in similar manner, or a stack of nickel-vanadium(Ni—V), for example.

Thereafter, as shown in FIG. 2C, the conductor layer 60 a can be formedat the first surface 41 of the substrate element 40, such that anexposed surface of the conductor layer becomes the first surface of thesubstrate element. The conductor layer 60 a can include a plurality oflayers of conductive traces 61 that are separated and insulated from oneanother by dielectric material 62. The contacts 70 can be formed at anexposed surface of the conductor layer 60 a, and such contacts can beelectrically connected with the conductive vias 44 through the traces 61of the conductor layer. The traces 61 and the contacts 70 can be formedusing similar methods as described above with reference to the firstconductive vias 44, and the dielectric material 62 can be formed usingsimilar methods as described above with reference to the dielectriclayer 45 (FIG. 2B).

Next, as shown in FIG. 2D, a support substrate 5 can be removablyattached to the conductor layer 60 a to hold and support thesemiconductor layer 40 during subsequent processing at the secondsurface 42 of the semiconductor layer. Then, as shown in FIG. 2E, thesemiconductor layer 40 can be thinned by removing material of the body40 a at the second surface 42, reducing the thickness of thesemiconductor layer from an initial thickness T1 (FIG. 2D) to a finalthickness T2 (FIG. 2E), such that ends 46 of the first conductive vias44 are exposed at the second surface 42 of the semiconductor layer. Thesemiconductor layer 40 can be thinned, for example, by a grinding orlapping process. The initial exposed second surface 42 can also beplanarized by lapping, polishing, or by high-precision milling.

Subsequently, a second conductor layer 60 b (FIG. 1A) can be formed atthe second surface 42 of the semiconductor layer 40. Such a secondconductor layer 60 b, if present, can be formed in a similar manner asthat described with reference to the first conductor layer 60 a (FIG.2C). Next, as shown in FIG. 2F, the support element 50 can be unitedwith the semiconductor layer 40, for example, using an adhesive layer ora B-stage material layer. The openings 53 can be formed extendingthrough the thickness of the body 50 a of the support element 50 betweenthe first and second surfaces 51, 52 thereof. The openings 53 can beformed for example, by selectively etching the support element 50, afterforming a mask layer where it is desired to preserve remaining portionsof the first surface 51. For example, a photoimageable layer, e.g., aphotoresist layer, can be deposited and patterned to cover only portionsof the first surface 51, after which a timed etch process can beconducted to form the openings 53. The openings 53 can be formed usingone or more of the processes described above for forming the openings43. The openings 53 can be formed before or after the support element 50is united with the substrate element 40.

Then, as shown in FIG. 2G, the dielectric material can be formedextending within the openings 56, and the dielectric layer 23 can beformed overlying the first surface 51 of the support element 50. Thedielectric material 56 and the dielectric layer 23 can be formed as asingle dielectric region in a single deposition process, or they can beformed as individual dielectric regions in separate depositionprocesses.

Next, as shown in FIG. 2H, a recess 57 can be formed within thedielectric material 56 in at least some of the openings 53 where it isdesired to deposit second conductive vias 54. The recesses 57 can beformed by any of the processes described above with reference to formingthe openings 43. Subsequently, referring to FIG. 2I, the secondconductive vias 54 can be formed within corresponding ones of therecesses 57, and the terminals 80 can be formed in contact withcorresponding ones of the second conductive vias.

Next, referring again to FIG. 1A, the microelectronic elements 30 can beassembled with the interconnection element 20, such that the elementcontacts 35 thereof are electrically connected with the contacts 70, andthe interconnection element can be assembled with the circuit panel 12,such that the terminals 80 are electrically connected with the panelcontacts 15. Then, the encapsulant can be deposited to at leastpartially cover the microelectronic elements 30.

FIGS. 3A through 3I illustrate variations of the second conductive vias54 of FIGS. 1A and 1B having alternate configurations. The conductivevia 54 a shown in FIG. 3A is the same as the conductive via 54 describedabove, except that the opening 53 a has rounded corners 59 extendingbetween the first surface 51 a of the body 50 a of the support element50 and the inner surfaces 55 of the opening. Such rounded corners 59 canreduce resulting stress on the support element 50 at the first surface51 thereof due to differential thermal expansion between theinterconnection element 20 and an external component such as the circuitpanel 12. The rounded corners 59 between the first surface 51 a of thebody 50 a of the support element 50 and the inner surfaces 55 of theopening 53 a can be formed, for example, by high pressure plasmaprocessing, a less anisotropic etching process than a conventionaletching process, or a wet or dry etching process. In a particularexample, the rounded corner 59 can have a radius of curvatureapproximately equal to a radius of the opening 53 a in a plane parallelto the first surface 51 a of the body 50 a.

The conductive via 54 b shown in FIG. 3B is the same as the conductivevia 54 a described above, except that the terminal 80 is displaced alongthe lateral direction L1 with respect to the end 58 of the conductivevia 54 b. A conductive trace can electrically connect the end 58 of theconductive via 54 b with the corresponding terminal 80.

The conductive via 54 c shown in FIG. 3C is the same as the conductivevia 54 described above, except that the conductive via 54 c has a widththat tapers from the first surface 51 of the support element 50 towardsthe second surface 52, such that the width W1 at the first surface isgreater than the width W2 at the second surface 52. In one example, theconductive via 54 c can have a frusto-conical shape.

The conductive via 54 d shown in FIG. 3D is the same as the conductivevia 54 described above, except that there is a gap 82 extending betweenthe dielectric region 56 d and the inner surfaces 55 of thecorresponding opening 53. In a particular example, as can be seen inFIG. 3D, the gap 82 need not extend the entire thickness T3 of thesupport element 50. For example, the gap 82 may extend a distance D3from the first surface 51 of the support element 50 towards the secondsurface 52, and a portion of the dielectric region 56 d may extendbetween the inner surface 55 and the conductive via 54 d below thedistance D3.

In an exemplary embodiment, the gap 82 may extend most of the distancebetween the first and second surfaces 51 and 52 of the support element50, except that the gap may be plugged or sealed adjacent the firstsurface, for example, by the insertion of a compliant sealant betweenthe dielectric region 56 d and the inner surfaces 55 of the opening 53.In such an embodiment, the gap 82 can be sealed at both ends, therebytrapping air within the gap. In one example, such a complaint plug mayextend up to 25% of the thickness T3 from the first surface 51 towardsthe second surface 52 of the support element 50.

The conductive via 54 e shown in FIG. 3E is a variation of theconductive via 54 d, where the conductive via 54 e has a tapered width,and the opening 54 has rounded corners 59 extending between the innersurfaces 55 of the opening 53 and the first surface 51 of the supportelement 50.

The conductive via 54 f shown in FIG. 3F is similar to the conductivevia 54 described above, except that the dielectric region 56 f does notextend to the first surface 51 of the support element 50, such thatthere is a gap 83 between portions of the conductive via 54 f and theinner surfaces 55 of the opening 53. Also, the terminal 80 is omitted,and the joining unit 11 is bonded to the tip 58 of the conductive via 54f adjacent the first surface 51 of the support element 50, and theconductive via 54 f has a width that tapers from the second surface 52of the support element towards the first surface, such that the width isgreater at the second surface than at the first surface.

In one example, the dielectric region 56 f can extend from the secondsurface 52 to a distance D4 of approximately 50% of the thickness T4 ofthe support element 50. In a particular embodiment, the dielectricregion 56 f can extend from the second surface 52 to a distance D4 ofbetween approximately 25% and approximately 75% of the thickness T4 ofthe support element 50.

The conductive via 54 g shown in FIG. 3G is the same as the conductivevia 54 a described above, except that the dielectric region 56 isomitted, and the conductive via 54 g is a thin wire, rather than aconductive post. A gap 82 can extend between outer surfaces of theconductive via 54 g and the inner surfaces 55 of the opening 53.

The conductive via 54 h shown in FIG. 3H is the same as the conductivevia 54 a described above, except that the terminal 80 is omitted. Thetip 58 of the conductive via 54 h extends above the first surface 51 ofthe support element 50, so that the joining unit 11 has a sufficientsurface with which to bond. The conductive via 54 i shown in FIG. 3I isthe same as the conductive via 54 described above, except that theterminal 80 is disposed against the exposed surface 51 a of the body 50a of the support element 50, rather than overlying the dielectric layer23.

The microelectronic assembly 110 shown in FIG. 4 is the same as themicroelectronic assembly 10 described above, except that wire bonds 116extend between the terminals 180 and the joining units 111, therebyproviding an ability of the interconnection element 120 to move relativeto the circuit panel 112 due to differential thermal expansion. Anencapsulant 195 can be provided to at least partially cover the wirebonds 116.

In a particular example, as shown at the left side of FIG. 4, at leastsome of the terminals 180 can be omitted, and a joining unit 111 a canbe electrically connected with an exposed end of the conductive via 154at the first surface 151 of the support element 150. In one example, afirst wire bond 116 a can extend between the joining unit 111 a and anintermediate joining unit 111 b, and a second wire bond 116 b can extendbetween the intermediate joining unit 111 b and the panel contact 115 ofthe circuit panel 112. In an exemplary embodiment (not shown), a singlewire bond may extend directly from the joining unit 111 a to the panelcontact 115, and the intermediate joining unit 111 b can be omitted. Inone example, a single wire bond 116 c can extend between a first joiningunit 111 c adjacent the first surface 151 of the support element 150 anda second joining unit 111 electrically connected with the panel contact115 of the circuit panel 112.

The microelectronic assembly 210 shown in FIG. 5 is the same as themicroelectronic assembly 10 described above, except that taperedconductive posts 218 extend between the terminals 280 and the joiningunits 211, thereby providing an ability of the interconnection element220 to move relative to the circuit panel 212 due to differentialthermal expansion. An encapsulant 295 can be provided to at leastpartially cover the tapered conductive posts 218.

The microelectronic assembly 310 shown in FIG. 6 is the same as themicroelectronic assembly 10 described above, except that the pluralityof first conductive vias 344 can have a minimum pitch P1 betweenlongitudinal axes of any two adjacent ones of the first conductive viasthat is substantially equal to a minimum pitch P2 between longitudinalaxes of any two adjacent ones of the plurality of second conductive vias354. As used herein, minimum pitch between conductive vias means thedistance in a direction parallel to the first surface 321 of theinterconnection element 320 between longitudinal axes extending throughthe centerlines of any two adjacent ones of the conductive vias.

In a particular embodiment, the minimum pitch P1 between the firstconductive vias 344 can be less than the minimum pitch P2 between thesecond conductive vias 354. In one example, the minimum pitch P1 betweenthe first conductive vias 344 can be greater than the minimum pitch P2between the second conductive vias 354. In an exemplary embodiment, theplurality of first conductive vias 344 can contain an equal or greaternumber of conductive vias than the plurality of second conductive vias354. In one embodiment, the plurality of first conductive vias 344 cancontain a lower number of conductive vias than the plurality of secondconductive vias 354.

Also, the microelectronic assembly 310 can have a plurality of firstconductive joining units 381 that can extend between exposed ends 344 aof at least some of the first conductive vias 344 and exposed ends 354 aof corresponding ones of the second conductive vias 354. The firstconductive joining units 381 need not directly connect the exposed ends344 a of the first conductive vias 344 with the exposed ends 354 a ofcorresponding ones of the second conductive vias 354.

For example, as shown at the right side of FIG. 6, the first conductivejoining units 381 can extend between a conductive pad 380 a exposed atthe second surface 342 of the substrate element 340 and a conductive pad380 b exposed at the second surface 352 of the support element 350.Furthermore, the conductive pads 380 a and 380 b need not directlycontact the respective first and second conductive vias 344 and 354.Rather, one or more of the conductive pads 380 a and 380 b can be spacedapart from the exposed ends of the respective first and secondconductive vias 344 and 354 and can be electrically connected therewithvia one or more conductor layers similar to the conductor layer 360.

The microelectronic assembly 310 can also have a plurality of secondconductive joining units 311 that can extend between exposed ends 354 bof at least some of the second conductive vias 354 corresponding ones ofthe panel contacts 315. The second conductive joining units 311 need notdirectly connect the exposed ends 354 b of the second conductive vias354 with the panel contacts 315. Rather, as shown at the right side ofFIG. 6, the second conductive joining units 311 can extend between aconductive pad 380 exposed at the second surface 322 of theinterconnection element 320 and a panel contact 315 exposed at a surface313 of the circuit panel 312. Furthermore, one or more of the conductivepads 380 can be spaced apart from the exposed end of a correspondingsecond conductive via 354 and can be electrically connected therewithvia one or more conductor layers similar to the conductor layer 360.

In one example, the first plurality of joining units 381 can contain anequal or greater number of joining units than the second plurality ofjoining units 311. In a particular embodiment, the first plurality ofjoining units 381 contains a fewer number of joining units than thesecond plurality of joining units 311.

In embodiments where the minimum pitch P1 between adjacent ones of thefirst conductive vias 344 is close to the minimum pitch P2 betweenadjacent ones of the second conductive vias 354, the difference betweenthe minimum pitch P1 and the minimum pitch P2 can be approximately 10%of the average diameter of the joining units 381. For example, if theaverage joining unit 381 has a diameter that is 50 microns, then thedifference between the minimum pitch P1 and the minimum pitch P2 can be5 microns. In such an embodiment, the joining unit 381 can accommodatesuch a lateral mismatch in alignment between corresponding ones of thefirst and second conductive vias 344 and 354.

Similar to the microelectronic assembly 10 shown in FIG. 1A, themicroelectronic assembly 310 can also include an encapsulant 390 thatcan optionally cover, partially cover, or leave uncovered the rearsurfaces 332 of the microelectronic elements 330. For example, in themicroelectronic assembly 310 shown in FIG. 6, an encapsulant can beflowed, stenciled, screened or dispensed onto the rear surfaces 332 ofthe microelectronic elements 330.

In one example, the encapsulant 390 can be a topographical overmold thathas first and second surface portions 391 a, 391 b that can conform tothe contour of the rear surfaces 332 of the microelectronic elements330. For example, the first surface portion 391 a of the encapsulant 390can be parallel to the rear surface 332 of the microelectronic element330 d (e.g., the top microelectronic element of a stack ofmicroelectronic elements that can be configured to predominantly providememory storage array function), and the second surface portion 391 b canbe parallel to the rear surface of the microelectronic element 330 e(e.g., a microelectronic element that can be configured to predominantlyprovide logic function), the first surface portion extending in adifferent plane than the second surface portion.

In such an example, the first surface portion 391 a of the encapsulant390 can be located a first distance T1 from the rear surface 332 of themicroelectronic element 330 d, and the second surface portion 391 b ofthe encapsulant can be located a second distance T2 from the rearsurface of the microelectronic element 330 e, where the distances T1 andT2 are equal or substantially equal. However, the first and secondsurface portions 391 a, 391 b can be located different distances fromthe first surface 321 of the interconnection element 320.

In a particular embodiment, the microelectronic assembly 310 can includean encapsulant or underfill (not shown) that can extend between thesecond surface 342 of the substrate element 340 and the second surface352 of the support element 350, surrounding the first joining units 381,for example, to provide mechanical support to the substrate elementand/or to minimize warpage of the substrate element. In one example, asimilar encapsulant or underfill (not shown) can extend between thesecond surface 322 of the interconnection substrate 320 and the surface313 of the circuit panel 312, surrounding the second conductive joiningunits 311. Also, an encapsulant or underfill can separate and insulatethe first conductive joining units 381 from one another. In one example,a dielectric material can be deposited onto exposed surfaces of thefirst joining units 381, using a vapor deposition process, and anencapsulant or overmold can then optionally be applied extending betweenthe first joining units.

In a particular embodiment, the microelectronic assembly 310 can alsoinclude one or more heat spreaders 395 a, 395 b in thermal communicationwith one or more of the microelectronic elements 30. The heat spreaders395 a and 395 b may be separate elements, or they may be differentportions of a single heat spreader. One or more of the heat spreaders395 a and 395 b can be coupled to an exposed surface (e.g., the rearsurface 332) of the microelectronic elements 330 by a layer of thermalgrease or a thermal adhesive 396, for example.

In one example, at least a portion of the heat spreader 395 b overlyinga microelectronic element 30 e that may be configured to predominantlyprovide logic function can have a thickness T2 that is equal orsubstantially equal to a thickness T1 of at least a portion of the heatspreader 395 a overlying a microelectronic element 30 d that may beconfigured to predominantly provide memory storage array function. In aparticular example, at least a portion of the heat spreader 395 boverlying a microelectronic element 30 e that may be configured topredominantly provide logic function can have a greater thickness thanat least a portion of the heat spreader 395 a overlying amicroelectronic element 30 d that may be configured to predominantlyprovide memory storage array function.

The components described above can be utilized in construction ofdiverse electronic systems, as shown in FIG. 7. For example, a system700 in accordance with a further embodiment of the invention includes amicroelectronic assembly 706 as described above in conjunction withother electronic components 708 and 710. In the example depicted,component 708 is a semiconductor chip whereas component 710 is a displayscreen, but any other components can be used. Of course, although onlytwo additional components are depicted in FIG. 7 for clarity ofillustration, the system may include any number of such components. Themicroelectronic assembly 706 may be any of the components describedabove. In a further variant, any number of such microelectronicassemblies 706 can be used.

The microelectronic assembly 706 and components 708 and 710 can bemounted in a common housing 701, schematically depicted in broken lines,and can be electrically interconnected with one another as necessary toform the desired circuit. In the exemplary system shown, the system caninclude a circuit panel 702 such as a flexible printed circuit board,and the circuit panel can include numerous conductors 704, of which onlyone is depicted in FIG. 7, interconnecting the components with oneanother. However, this is merely exemplary; any suitable structure formaking electrical connections can be used.

The housing 701 is depicted as a portable housing of the type usable,for example, in a cellular telephone or personal digital assistant, andscreen 710 can be exposed at the surface of the housing. Where structure706 includes a light-sensitive element such as an imaging chip, a lens711 or other optical device also can be provided for routing light tothe structure. Again, the simplified system shown in FIG. 7 is merelyexemplary; other systems, including systems commonly regarded as fixedstructures, such as desktop computers, routers and the like can be madeusing the structures discussed above.

Although a silicon substrate having active device regions therein isonly described with reference to the embodiment shown in FIGS. 1A and1B, the substrate element of any of the components described herein canbe made of silicon or a dielectric material such as glass, a low-kmaterial (i.e., a material having a k less than 3.5), ceramic, acomposite material, or symmetric or asymmetric laminates, as describedabove. When the substrate element is made of silicon, any such substrateelement in any of the embodiments described herein can include activesemiconductor devices in one or more active device regions of thesubstrate element.

The openings, apertures, and conductive elements disclosed herein can beformed by processes such as those disclosed in greater detail in UnitedStates Patent Application Publication Nos. 2008/0246136, 2012/0018863,2012/0018868, 2012/0018893, 2012/0018894, 2012/0018895, and2012/0020026, the disclosures of which are hereby incorporated byreference herein.

Although the invention herein has been described with reference toparticular embodiments, it is to be understood that these embodimentsare merely illustrative of the principles and applications of thepresent invention. It is therefore to be understood that numerousmodifications may be made to the illustrative embodiments and that otherarrangements may be devised without departing from the spirit and scopeof the present invention as defined by the appended claims.

It will be appreciated that the various dependent claims and thefeatures set forth therein can be combined in different ways thanpresented in the initial claims. It will also be appreciated that thefeatures described in connection with individual embodiments may beshared with others of the described embodiments.

1. A composite interposer, comprising: a substrate element consistingessentially of at least one of dielectric or semiconductor material, thesubstrate element having first and second opposite surfaces defining athickness of 200 microns or less, and having a plurality of contactsexposed at the first surface and electrically conductive structureextending through the thickness; and a support element having: a body ofat least one of dielectric or semiconductor material exposed at a secondsurface of the support element, the second surface of the supportelement united with the second surface of the substrate element, thebody having a coefficient of thermal expansion (“CTE”) of less than 12parts per million per degree Celsius (“ppm/° C.”); openings extendingthrough a thickness of the body between the second surface of thesupport element and a first surface opposite thereto; a plurality ofelectrically conductive vias extending within at least some of theopenings in a direction of the thickness of the body; and terminalsexposed at the first surface of the support element that are configuredto electrically connect the interposer with a component external to theinterposer, wherein the terminals are electrically connected with thecontacts through the conductive vias and the electrically conductivestructure.
 2. The composite interposer as claimed in claim 1, whereinthe electrically conductive structure extending through the substrateelement thickness includes a plurality of conductive vias, wherein aminimum pitch between any two adjacent ones of the conductive vias ofthe substrate element is less than or equal to a minimum pitch betweenany two adjacent ones of the conductive vias extending through theopenings of the support element.
 3. The composite interposer as claimedin claim 1, wherein the thickness of the substrate element is less thanthe thickness of the support element.
 4. The composite interposer asclaimed in claim 3, wherein the thickness of the substrate element isless than one-fifth the thickness of the support element.
 5. Thecomposite interposer as claimed in claim 1, wherein the thickness of thesupport element is at least 1.5 times the thickness of the substrateelement, and wherein the Young's modulus of the support element isgreater than 60 GPa.
 6. The composite interposer as claimed in claim 1,wherein the thickness of the support element is at least 1.5 times thethickness of the substrate element, and wherein the Young's modulus ofthe support element is at least 1.3 times the Young's modulus of thesubstrate.
 7. The composite interposer as claimed in claim 1, whereinthe substrate element consists essentially of a semiconductor material.8. The composite interposer as claimed in claim 7, wherein the body ofthe support element consists essentially of glass, ceramic, or a low-kmaterial.
 9. The composite interposer as claimed in claim 1, wherein thebody of the support element has a CTE that is within 30% of the CTE ofthe substrate element.
 10. The composite interposer as claimed in claim1, further comprising a compliant dielectric layer extending along thefirst surface of the support element, wherein at least some of theterminals at least partially overlie the compliant dielectric layer. 11.The composite interposer as claimed in claim 1, wherein ends of theconductive vias adjacent the terminals are movable in a first directionof the at least one lateral direction relative to the substrate element.12. The composite interposer as claimed in claim 11, wherein theconductive vias are configured to reduce stresses applied to thecomposite interposer from differential thermal expansion relative to acomponent attached thereto adjacent the conductive vias.
 13. Thecomposite interposer as claimed in claim 1, wherein an outer surface ofeach conductive via does not conform to a contour of an inner surface ofthe corresponding one of the openings.
 14. The composite interposer asclaimed in claim 1, wherein each conductive via substantially entirelyfills the corresponding one of the openings.
 15. The compositeinterposer as claimed in claim 1, wherein at least some of theconductive vias are wire bonds.
 16. The composite interposer as claimedin claim 1, wherein each of at least some of the conductive vias isseparated by a compliant dielectric material from an inner surface ofthe opening in which it extends.
 17. The composite interposer as claimedin claim 16, wherein at least some of the openings each define a roundedcorner between the inner surface of the opening and the first surface ofthe support element.
 18. The composite interposer as claimed in claim 1,wherein each of at least some of the conductive vias is separated froman inner surface of the opening in which it extends by a void extendingtherebetween.
 19. The composite interposer as claimed in claim 1,wherein one or more of the openings each has a plurality of theconductive vias extending therein.
 20. The composite interposer asclaimed in claim 1, wherein one or more of the openings each areentirely filled with a dielectric material.
 21. The composite interposeras claimed in claim 1, further comprising a conductor layer extendingalong at least one of the second surfaces of the substrate element orthe support element, the conductor layer providing direct electricalconnection between the conductive vias and the electrically conductivestructure.
 22. A composite interposer, comprising: a substrate elementconsisting essentially of at least one of dielectric or semiconductormaterial, the substrate element having first and second oppositesurfaces defining a thickness of 200 microns or less, and having aplurality of contacts exposed at the first surface and electricallyconductive structure extending through the thickness; and a supportelement having: a body of at least one of dielectric or semiconductormaterial exposed at a second surface of the support element, the secondsurface of the support element facing the second surface of thesubstrate element, the body having a CTE of less than 12 ppm/° C.;openings extending through a thickness of the body between the secondsurface of the support element and a first surface opposite thereto; aplurality of electrically conductive vias extending within at least someof the openings in a direction of the thickness of the body; andterminals exposed at the first surface of the support element that areconfigured to electrically connect the interposer with a componentexternal to the interposer, wherein the terminals are electricallyconnected with the contacts through the conductive vias and theelectrically conductive structure, the support element joined with thesubstrate element by a plurality of conductive joining unitselectrically connecting the conductive vias and the electricallyconductive structure.
 23. A microelectronic assembly, comprising: amicroelectronic element having a surface bearing element contactsthereon; and a composite interposer, including: a substrate elementhaving first and second opposite surfaces, a plurality of contactsexposed at the first surface, and electrically conductive structureextending through a thickness of the substrate element, themicroelectronic element being assembled with the substrate element suchthat at least some of the contacts are electrically connected with atleast some of the element contacts; and a support element assembled withthe substrate element, the support element having: a body of at leastone of dielectric or semiconductor material exposed at a second surfaceof the support element, the second surface of the support element facingthe second surface of the substrate element; openings extending througha thickness of the body between the second surface of the supportelement and a first surface opposite thereto; a plurality ofelectrically conductive vias extending within at least some of theopenings in a direction of the thickness of the body; and terminalsexposed at the first surface of the support element that are configuredto electrically connect the interposer with a component external to themicroelectronic assembly, wherein the terminals are electricallyconnected with the contacts through the conductive vias and theelectrically conductive structure.
 24. The microelectronic assembly asclaimed in claim 23, wherein the microelectronic element embodies agreater number of active devices to provide memory storage arrayfunction than any other function.
 25. The microelectronic assembly asclaimed in claim 24, further comprising an additional microelectronicelement having a surface bearing element contacts thereon and includinga semiconductor chip configured predominantly to perform a logicfunction, at least some of the contacts of the substrate element beingelectrically connected with at least some of the element contacts of theadditional microelectronic element.
 26. The microelectronic assembly asclaimed in claim 23, wherein the microelectronic element includes aplurality of stacked electrically interconnected semiconductor chips.27. The microelectronic assembly as claimed in claim 23, furthercomprising a conductor layer extending along at least one of the secondsurfaces of the substrate element or the support element, the conductorlayer providing direct electrical connection between the conductive viasand the electrically conductive structure.
 28. The microelectronicassembly as claimed in claim 23, wherein the support element is joinedwith the substrate element by a plurality of conductive joining unitselectrically connecting the conductive vias and the electricallyconductive structure.
 29. A system comprising a microelectronic assemblyas claimed in claim 23 mounted to a circuit panel, at least some of theterminals of the microelectronic assembly being joined to andelectrically connected with panel contacts exposed at a surface of thecircuit panel.
 30. The system as claimed in claim 29, wherein theterminals are electrically connected to the panel contacts by conductiveleads that at least partially include wire bonds.
 31. The system asclaimed in claim 29, wherein the support element is joined with thesubstrate element by a first plurality of conductive joining unitselectrically connecting the conductive vias and the electricallyconductive structure, and wherein the support element is joined with thecircuit panel by a second plurality of joining units electricallyconnecting the conductive vias and the panel contacts.
 32. A systemcomprising a microelectronic assembly according to claim 23 and one ormore other electronic components electrically connected to themicroelectronic assembly.
 33. The system as claimed in claim 32, furthercomprising a housing, the microelectronic assembly and the one or moreother electronic components being assembled with the housing.
 34. Amethod of fabricating a microelectronic assembly, comprising: unitingexposed surfaces of at least one of dielectric or semiconductor materialof a substrate element and a support element with one another, thesubstrate element having first and second opposite surfaces defining athickness of 200 microns or less, and having a plurality of contactsexposed at the first surface and electrically conductive structureextending through the thickness, the exposed surface of the at least oneof dielectric or semiconductor material of the substrate element beingthe second surface thereof, the support element having a body havingfirst and second opposite surfaces and a CTE of less than 12 ppm/° C.,and having openings extending between the first and second surfaces ofthe support element through a thickness of the body, the exposed surfaceof the at least one of dielectric or semiconductor material of thesupport element being the second surface thereof; forming electricallyconductive vias extending within the openings and terminals exposed atthe first surface of the support element, the terminals beingelectrically connected with the contacts through the conductive vias andthe electrically conductive structure.
 35. The method as claimed inclaim 34, wherein the step of forming the conductive vias and theterminals forms at least some of the terminals integrally with theconductive vias as ends of the conductive vias.
 36. The method asclaimed in claim 34, further comprising forming a compliant dielectricmaterial extending within the openings, wherein the conductive vias areformed extending within an aperture extending through the compliantdielectric material.
 37. The method as claimed in claim 34, furthercomprising forming a compliant dielectric layer extending along thefirst surface of the support element.
 38. The method as claimed in claim34, further comprising forming a conductor layer extending along atleast one of the second surfaces of the substrate element or the supportelement, the conductor layer providing direct electrical connectionbetween the conductive vias and the electrically conductive structure.39. A method of fabricating a microelectronic assembly, comprising:assembling a microelectronic element with a composite interposer, themicroelectronic element having a surface bearing element contactsthereon, the composite interposer comprising: a substrate elementconsisting essentially of at least one of dielectric or semiconductormaterial, the substrate element having first and second oppositesurfaces defining a thickness of 200 microns or less, and having aplurality of contacts exposed at the first surface and electricallyconductive structure extending through the thickness; and a supportelement having: a body of at least one of dielectric or semiconductormaterial exposed at a second surface of the support element, the secondsurface of the support element united with the second surface of thesubstrate element, the body having a CTE of less than 12 ppm/° C.;openings extending through a thickness of the body between the secondsurface of the support element and a first surface opposite thereto; aplurality of electrically conductive vias extending within at least someof the openings in a direction of the thickness of the body; andterminals exposed at the first surface of the support element that areconfigured to electrically connect the interposer with a componentexternal to the interposer, wherein the terminals are electricallyconnected with the contacts through the conductive vias and theelectrically conductive structure, wherein the assembling step includeselectrically connecting at least some of the contacts of the substrateelement with at least some of the element contacts.
 40. The method asclaimed in claim 39, further comprising assembling a circuit panel withthe support element, at least some of the terminals of themicroelectronic assembly being joined to and electrically connected withpanel contacts exposed at a surface of the circuit panel.